金属学报  1987, Vol. 23 Issue (5): 459-463

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非晶态CoFeNiNbSiB软磁薄膜的性质与弛豫过程的研究

刘宜华;梅良模;王德新;郭贻诚

山东大学;山东大学;山东大学;山东大学

MAGNETIC PROPERTIES AND RELAXATION PROCESS OF AMORPHOUS CoFeNiNbSiB SOFT MAGNETIC FILMS

by LIU Yihua; MEI Liangmo; WANG Dexin; GUO Yicheng (Department of physics; Shandong University; Jinan)(Manuscript received 10 July; 1985; revised manuscript 10 January; 1986)

刘宜华;梅良模;王德新;郭贻诚. 非晶态CoFeNiNbSiB软磁薄膜的性质与弛豫过程的研究[J]. 金属学报, 1987, 23(5): 459-463.
, , , . MAGNETIC PROPERTIES AND RELAXATION PROCESS OF AMORPHOUS CoFeNiNbSiB SOFT MAGNETIC FILMS[J]. Acta Metall Sin, 1987, 23(5): 459-463.

摘要 参考文献 相关文章 Metrics 全文: PDF(440 KB)   摘要: 用射频溅射法系统研究了非晶态CoFeNiNbSiB软磁薄膜的制备工艺,发现在0.5Pa的低氩气压下,可以得到性能优良的软磁薄膜,而且膜的性能受衬底偏压影响很小.经旋转磁场退火热处理后,膜的起始磁导率一直到10MHz都可在3000以上,表现出良好的频率特性.用电阻法研究了非晶膜在退火过程中的结构变化过程,发现高温下非晶膜明显经历了四个连续的阶段。 Abstract：The preparing processes of amorphous CoFeNiNbSiB soft magnetic thin films using r. f. sputtering have been investigated systematically. It was found that high quality soft magnetic films can be obtained at low pressure Ar(0.5 Pa), and the properties of films are less influenced by the bias. After annealing in a rotating field, the initial permeability of films is not less than 3000, at the field up to 10 MHz, and they show a good frequency response! The structural relaxation process of amorphous films during annealing has been studied by means of resistance monitoring method. Four successive relaxation stages have been observed at high temperature. 收稿日期: 1987-05-18      基金资助:国家科委基金资助;;中国科学院科学基金资助 服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 刘宜华 梅良模 王德新 郭贻诚 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y1987/V23/I5/459 1 Shimada Y, Hasegawa T, Kojima H. IEEE Trans Magn, 1981; MAG-17: 1199 2 Sakakima H. IEEE Trans Magn, 1983; MAG-19: 131 3 Fujimori H, Kazama N S, Hirose K, Zhang Jiaji, Morita H, Sato I, Sugawara H. J Appl Phys, 1984; 55 (6) : 1769 4 刘玉志,刘光棣,朱祥宾,李长才,张秋荣,陈炜.上海钢研(专辑)。冶金部首届非晶态合金及应用学术交流会论文集,上海钢铁研究所,1983:9 5 刘宜华,栾开政,郭贻诚.科学通报,1984;29(23) :1419 6 Kajiura M, Togami Y, Kobayashi K, Teranishi T. Jpn J Appl Phys, 1981; 20 (6) : L389 7 Hoshi Y, Kazama H, Naoe M, Yamanaka S. IEEE Trans Magn, 1983; MAG-19: 1958 8 Wasede Y, Okazaki H, Masumoto T. J Mater Sci, 1977; 12: 1927 No related articles found! Viewed Full text Abstract Cited   Shared      Discussed