金属学报  2007, Vol. 43 Issue (2): 154-158

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TiN/Si3N4纳米多层膜硬度对Si3N4层厚敏感性的研究

赵文济 孔明 乌晓燕 李戈扬

上海交通大学金属基复合材料国家重点实验室; 上海 200030

Study on the Sensitivity of Mechanical Properties of TiN/Si3N4 Nano-structured Film to Si3N4 Layer Thickness

Ge-Yang LI;;;

上海交通大学材料科学与工程学院金属基复合材料国家重点实验室

赵文济; 孔明; 乌晓燕; 李戈扬 . TiN/Si3N4纳米多层膜硬度对Si3N4层厚敏感性的研究[J]. 金属学报, 2007, 43(2): 154-158 .
, , , . Study on the Sensitivity of Mechanical Properties of TiN/Si3N4 Nano-structured Film to Si3N4 Layer Thickness[J]. Acta Metall Sin, 2007, 43(2): 154-158 .

摘要 参考文献 相关文章 Metrics 全文: PDF(310 KB)   摘要: 通过反应磁控溅射制备了一系列不同Si3N4层厚的TiN/Si3N4纳米多层膜，利用X射线衍射仪、高分辨透射电子显微镜、扫描电子显微镜和微力学探针表征了多层膜的微结构和力学性能，研究了其力学性能随Si3N4层厚微小改变而显著变化的原因。结果表明，在TiN调制层晶体结构的模板作用下，溅射态以非晶存在的Si3N4层在其厚度小于0.7 nm时被强制晶化为NaCl结构的赝晶体，多层膜形成共格外延生长的（111）择优取向超晶格柱状晶，并相应产生硬度显著升高的超硬效应，最高硬度达到38.5 GPa。Si3N4随自身层厚进一步的微小增加便转变为非晶态，多层膜的共格生长结构因而受到破坏，其硬度也随之降低。 关键词 ： TiN/Si3N4纳米多层膜,  外延生长,  晶体化,  超硬     Abstract：A series of TiN/Si3N4 nano-multilayers with different Si3N4 modulation thickness were reactively deposited by magnetic sputtering in order to study the sensibility of mechanical properties of TiN/Si3N4 multilayers on the change of Si3N4 thickness. The microstructure of the multilayers was characterized with X-ray diffraction, high-resolution transmission electron microscopy and scanning electron microscopy. A nanoindentor was introduced to measure the mechanical properties. Results show that when the thickness is less than 0.7 nm, Si3N4, normally amorphous in deposition state, could form a NaCl-type pseduocrystal structure due to the template effect of TiN crystal layer. Crystallized Si3N4 layers and TiN template layers grow coherently into columnar crystals with (111) preferred orientation. Correspondingly, the hardness of the films was enhanced to a maxim value of 38.5 GPa, showing a superhardness effect. Further increasing Si3N4 layers thickness, the coherent interfaces of the multilayers were damaged and Si3N4 layers become amorphous, accompanying by the decline in the hardness of the coatings. Key words： TiN/Si3N4 nano-multilayers    epitaxial growth    crystallization    superhard effect 收稿日期: 2006-05-29      ZTFLH:  O484.4   服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 赵文济 孔明 乌晓燕 李戈扬 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y2007/V43/I2/154 [1]Helmersson U,Todorova S,Barnett S A,Sundgren J E,Markert L C,Greene J E.d Appl Phys,1987;62:481 [2]Sproul W D.Science,1996;273:889 [3]Veprek S,Reiprich S,Li S Z.Appl Phys Lett,1995;66:2640 [4]Veprek S,Niederhofer A,Moto K,Bolom T,Mannling H D,Nesladek P,Dollinger G,Bergmaier A.Surf Coat Technol,2000;133-134:152 [5]Chen Y H,Lee K W,Chiou W A,Chung Y W,Keer L M.Surf Coat Technol,2001;146-147:209 [6]Sderberg H,Odén M,Molina-Aldereguia J M,HultmanL.J Appl Phys,2005;97:114327 [7]Chen Y H,Guruz M,Chung Y W,Keer L M.Surf Goat Technol,2002;154:162 [8]Veprek S,Maritza G J,Heijman V,Karvankova P,Prochazka J.Thin Solid Films,2005;476:1 [9]Kim C,Qadri S B,Scanlon M R,Cammarata R C.Thin Solid Films,1994;240:52 [10]Tian J W,Han Z H,Lai Q X,Yu X J,Li G Y,Gu M Y.Surf Goat Technol,2004;176:267 [11]Deutsches Institut fur Normung.DIN 50359-1.Universal h(?)rteprüfung,1997 [12]Oliver W C,Pharr G M.J Mater Res,1992;7:1564 [13]Wei L,Mei F H,Shao N,Li G Y,Li J G.Acta Phys Sin,2005;54:1742(魏仑，梅芳华，邵楠，李戈扬，李建国．物理学报．2005；54：1742) [14]Lao J J,Kong M,Zhang H J,Li G Y.Acta Phys Sin,2004;53:1961(劳技军，孔明，张惠娟，李戈扬．物理学报，2004；53：1961) [15]Wu D W,Fu D J,Mao X W,Ye M S,Peng Y G,Fan X 3.Acta Phys Sin,1999;48:904(吴大维，付德君，毛先维，叶明生，彭友贵，范湘军．物理学报，1999；48：904) [16]Zhang Z Y,Lagally M G.Science,1997;276:377 [17]Koehler J S.Phys Rev,1970;2B:547 [18]Kato M,Mori T,Schwartz L H.Acta Metall,1980;28:285 [19]Anderson P M,Li C.Nanostruct Mater,1995;5:349 [1] 杨高林,林鑫,胡桥,张莹,汪志太,李鹏,黄卫东. Zr55Cu33Al10Ni5块体非晶合金退火处理后脉冲激重熔晶化行为[J]. 金属学报, 2013, 49(6): 649-657. [2] 黄碧龙; 吴昕蔚; 孔明; 李戈扬 . 反应磁控溅射 TiN/AlON纳米多层膜的微结构与显微硬度[J]. 金属学报, 2008, 44(2): 193-197 . [3] 郭岩; 徐彬; 吴贵智; 马胜利; 徐可为 . PCVD法制备的Ti--Si--C--N纳米复合超硬薄膜的高温氧化行为[J]. 金属学报, 2007, 43(2): 159-164 . [4] 许俊华; 李戈扬; 顾明元 . TaN／TiN和TaWN／TiN多晶超晶格薄膜的微结构与超硬效应[J]. 金属学报, 1999, 35(11): 1214-1218 . [5] 钟敏霖;刘文今;姚可夫;任家烈;胡姝嫱;赵宏. Fe─C─Si─B合金连续激光非晶化及非晶形成条件的研究[J]. 金属学报, 1997, 33(4): 413-419. [6] 蒋兴钢;吴庆龄;崔建忠;马龙翔. LC4超硬Al合金的超塑变形行为[J]. 金属学报, 1990, 26(4): 158-160. [7] 高巧君;郑天佐. 金属外延生长的原子级观察[J]. 金属学报, 1989, 25(1): 1-6. Viewed Full text Abstract Cited   Shared      Discussed