金属学报  1992, Vol. 28 Issue (4): 77-82

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PVD薄膜的粘附性和塑韧性评估

刘长清;金柱京;于力;于志明;吴维(山文)

中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室;中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室;中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室;中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室;中国科学院金属腐蚀与防护研究所腐蚀科学开放研究实验室

EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS

LIU Changqing;JIN Zhujing;YU Li;YU Zhiming;WU Weitao Corrosion Science Laboratory; Institute of Corrsion and Protection of Metals; Academia Sinica; Shenyang

刘长清;金柱京;于力;于志明;吴维(山文). PVD薄膜的粘附性和塑韧性评估[J]. 金属学报, 1992, 28(4): 77-82.
, , , , . EVALUATION OF ADHESION AND PLASTICITY OF PVD FILMS[J]. Acta Metall Sin, 1992, 28(4): 77-82.

摘要 参考文献 相关文章 Metrics 全文: PDF(1127 KB)   摘要: 采用物理气相沉积(PVD)技术,在单面抛光的缺口拉伸试样上生长Ti和TiN薄膜,采用扫描电镜(SEM)观察膜面以0.05mm/min变形速度拉伸变形行为并记录和确定膜的开裂和脱落时的临界伸长量δ_c和δ_s,用来评价薄膜的粘附性和塑韧性;相同的膜/基体系进行划痕实验,确定其临界载荷L_c并评价膜的粘附性,结果表明前者较好地说明了膜与基体粘附性和膜自身的塑韧性,后者只能评价膜的粘附性,而且两种方法评价粘附性有良好的一致性,此外还比较了几种涂层样品的拉伸曲线并讨论了薄膜的塑韧性和粘附性对基材屈服极限的影响,引入了粘附功判据 关键词 ： PVD薄膜,  粘附性,  塑韧性,  恒速拉伸法,  划痕法     Abstract：Evaluation of adhesion of PVD Ti and TiN films on A_3 steel was carried out bya newly developed method, so called constant rate pulling test (CRPT) at 0.05mm/min, underSEM observation simultaneously. As the criterion, the critical cracking or spalling elongationof the film/substrate system on the one-sided polishing notched tensile specimen may be de-termined, respectively, to evaluate the plasticity and adherence of the film to substrate. Theconventional scratch test was also made for evaluation of the adhesion of films of the same sys-tems. Both give the coordinate assessment for all of the systems. In addition, the influence ofadhesion of the films to the substrate on ultimate YS of substrate material was discussed andanother criterion for adhesion assessment was proposed. Key words： PVD film    constant rate pulling test    scratch test    adhesion 收稿日期: 1992-04-18      服务 把本文推荐给朋友 加入引用管理器 E-mail Alert RSS 作者相关文章 刘长清 金柱京 于力 于志明 吴维(山文) 44.8K 链接本文: https://www.ams.org.cn/CN/      或      https://www.ams.org.cn/CN/Y1992/V28/I4/77 1 Cheng C C, Erdemir A, Fenske G R. Surf Coat Technol, 1989; 39/40: 365 2 Je J H, Gyarmati E, Naoumidis A. Thin Solid Films, 1986; 136: 57 3 Perry A J. Surf Eng, 1986; 2: 183 4 Kopacz W, Jehn H A. Vacuum, 1986; 36: 81 5 Hedenqvist P, Olsson M, Jacobson S, Soderberg S. Surf Coat Technol, 1990; 41: 13 6 刘长清.中国科学院金属腐蚀与防护研究所硕士学位论文,1988 7 Laugier M. Thin Solid Films, 1981; 76: 289 8 Coghill M D E, Stjohn D H. Surf Coat Technol, 1990; 41: 135 9 Wu W, Liu C, Jin Z, Yu Z, Yu L, Shi C. Mater Sci Eng, 1991; A131: 203 10 Laugier M T. Thin Solid Films, 1984; 117: 243 [1] 唐武; 马幼平; 徐可为; 王平; 李弦 . Au/NiCr/Ta和Au/NiCr多层金属膜的划痕特征载荷[J]. 金属学报, 2002, 38(4): 407-410 . [2] 李铁藩;马信清. 弥散Gd_2O_3质点改性的新型复合铝化物涂层的氧化行为[J]. 金属学报, 1991, 27(1): 102-107. Viewed Full text Abstract Cited   Shared      Discussed