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不同靶材料的高功率脉冲磁控溅射放电行为 |
吴忠振1,2( ), 田修波2, 潘锋1, 付劲裕3, 朱剑豪3 |
1 北京大学深圳研究生院新材料学院, 深圳 518055 2 哈尔滨工业大学先进焊接与连接国家重点实验室, 哈尔滨 150001 3 香港城市大学物理与材料科学系, 香港 |
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HIGH POWER PULSED MAGNETRON SPUTTERING DISCHARGE BEHAVIOR OF VARIOUS TARGET MATERIALS |
WU Zhongzhensup1,2( ), TIAN Xiubosup2, PAN Fengsup1, FU K Y Rsup3, CHU K Psup3 |
1 School of Advanced Materials, Peking University Shenzhen Graduate School, Shenzhen 518055 2 State Key Laboratory of Advanced Welding Production and Technology, Harbin Institute of Technology, Harbin 150001 3 Department of Physics and Materials Science, City University of Hong Kong, Hong Kong |
引用本文:
吴忠振, 田修波, 潘锋, 付劲裕, 朱剑豪. 不同靶材料的高功率脉冲磁控溅射放电行为[J]. 金属学报, 2014, 50(10): 1279-1284.
Zhongzhen WU,
Xiubo TIAN,
Feng PAN,
K Y R FU,
K P CHU.
HIGH POWER PULSED MAGNETRON SPUTTERING DISCHARGE BEHAVIOR OF VARIOUS TARGET MATERIALS[J]. Acta Metall Sin, 2014, 50(10): 1279-1284.
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