Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices
Received date: 2022-04-17
Revised date: 2022-06-10
Online published: 2022-06-22
Supported by
National Natural Science Foundation of China(52073290);National Natural Science Foundation of China(51927803);Science Fund for Distinguished Young Scholars of Liaoning Province(2023JH6/100500004);Natural Science Foundation of Liaoning Province(2022-MS-011);Shenyang Science and Technology Plan Project(23-407-3-23)
A miniature flexible thermoelectric generator with a stretchable three-dimensional (3D) arch structure is designed using polydimethylsiloxane (PDMS) as a substrate and the excellent thermoelectric properties and flexibility of single-wall carbon nanotube (SWCNT)/Bi2Te3 thermoelectric hybrid film. The device fully utilizes optimal in-plane thermoelectric performance direction of the film material and obtains electro-thermal conversion through temperature differences between the inside and outside of the device plane. Therefore, thermoelectric potential is generated at both ends of the electrode to achieve power generation. When the temperature difference was 4 K, the output voltage is 4.8 mV, the maximum output power is 2.6 × 10-9 W, the power density is 3.9 × 10-9 W/cm2, and the minimum bending radius of the device can reach 3 mm. The fabrication process for this miniature flexible thermoelectric device is simple, feasible, and low-cost, providing a new avenue for developing flexible thermoelectric thin-film power generation devices.
LIU Rui , YU Zhi , ZHAO Yang , LI Xiaoqi , YU Hailong , HE Juan , NIE Pengcheng , WANG Chunyu , TAI Kaiping , LIU Chang . Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices[J]. Acta Metall Sin, 2024 , 60(3) : 348 -356 . DOI: 10.11900/0412.1961.2022.00171
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