Acta Metall Sin  2005, Vol. 41 Issue (4): 437-443     DOI:

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Numerical Analysis Of Spacial Field In Hot Filament Chemical Vapor Deposition Diamond Film

LI Jianguo; LIU Shi; LI Yiyi;HU Dongping; JI Xilin; MEI Jun;ZHOU Dehui

LI Jianguo; LIU Shi; LI Yiyi; HU Dongping; JI Xilin; MEI Jun; ZHOU Dehui. Numerical Analysis Of Spacial Field In Hot Filament Chemical Vapor Deposition Diamond Film. Acta Metall Sin, 2005, 41(4): 437-443 .

Abstract References Related Articles Recommended Metrics Download:  PDF(272KB)  Export:  BibTeX | EndNote (RIS)       Abstract  Two--dimension coupled model of the temperature filed, velocity field and density field was developed according to the geometry and technology parameters in hot filament chemical vapor deposition (HFCVD) diamond film. The spacial field during large area diamond film deposition was simulated using this model to study the influence of deposited parameters. The calculated results about the temperature and the mass flow density on the substrate are consistent with experimented ones. The inlet gas velocity obviously affects the uniformity of the mass flow density, and the other deposited parameters have little influence on the distributions of the temperature and mass flow density. The optimal hot filament geometry parameters to deposit high quality diamond films with an area of 100mmx100 mm are gained on the basis of the minimum temperature along hot filament array. Key words:  HFCVD      coupled model      spacial field       Received:  27 May 2004      ZTFLH:  TB383   Service E-mail this article Add to citation manager E-mail Alert RSS （） Articles by authors LI Jianguo LIU Shi LI Yiyi HU Dongping JI Xilin MEI Jun ZHOU Dehui URL:  https://www.ams.org.cn/EN/     OR     https://www.ams.org.cn/EN/Y2005/V41/I4/437 [1]Banholzer W. Surf Coating Technol, 1992; 53: 1 [2]Wolden C, Mitra S, Gleason K K. J Appl Phys, 1992; 72: 3750 [3]Wang A Y, Sun C, Wang B, Gong J, Huang R F, Wen L S. Ada Metall Sin, 2001; 37: 1217 (汪爱英,孙超,王冰,宫俊,黄荣芳,闻立时.金属学 报,2001;37:1217) [4]Song X M, Zhang X W, Wang B, Chen G H, Yan H. J Beijing Polytechnic Univ, 1999; 25: 91 (宋雪梅,张兴旺,王波,陈光华,严辉.北京工业大学学 报,1999;25:91) [5]Qi X G, Chen Z S. Mater Sci Eng, 2001; 19(3): 29 (戚学贵,陈则韶.材料科学与工程, 2001;19(3):29) [6]Mark G M, Wen L H, Michael E C, David S D. J Appl Phys, 1994; 76: 7567 [7]Dai D H, Zhou K S. Deposition Technology and Application of Diamond Film. Beijin: Metallurgical Industry Press, 2001: 118 (戴达煌,周克崧.金刚石薄膜沉积制备工艺与应用.北京:冶 金工业出版社,2001:118) [8]Chen Y, Yu J, Chen G C. Vacuum, 1998; 6: 11 (陈岩,于杰,陈广超.真空,1998;6:11) [9]Spitsyn B V, Bouilov L L, Derjaguin B V. J Cryst Growth, 1981; 52: 219 [1] LI Shuaijun XIONG Shoumei Mei Li John Allison. NUMERICAL SIMULATION OF AIR ENTRAPMENT PHENOMENON DURING MOLD FILLING OF HIGH PRESSURE DIE CASTING PROCESS[J]. 金属学报, 2010, 46(5): 554-560. [2] Dunwen Zuo; Wenzhuang Lu; Min Wang. Study on the micro structure and residual stress of nanocrystalline diamond film[J]. 金属学报, 2008, 44(1): 74-78 . [3] . [J]. 金属学报, 2007, 43(6): 595-598 . [4] . COUPLED NUMBERICAL SIMULATION ON SOLIDIFICATION AND SOLUTE TRANSPORT IN THIN SLAB CONTINUOUS CASTING PROCESS[J]. 金属学报, 2006, 42(2): 211-217 . No Suggested Reading articles found! Viewed Full text Abstract Cited   Shared      Discussed