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Acta Metall Sin  1994, Vol. 30 Issue (23): 503-507    DOI:
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ADHESIVE STRENGTH OF TiN COATING DEPOSITED BY PULSED HIGH ENERGY DENSITY PLASMA
YAN Pengxun; YANG Size; CHEN Xishen (Institute of physics; Chinese Academy of Sciences; Beijing)(Manuscript received 3 May; 1994;in revised form 28 July; 1994)
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YAN Pengxun; YANG Size; CHEN Xishen (Institute of physics; Chinese Academy of Sciences; Beijing)(Manuscript received 3 May; 1994;in revised form 28 July; 1994). ADHESIVE STRENGTH OF TiN COATING DEPOSITED BY PULSED HIGH ENERGY DENSITY PLASMA. Acta Metall Sin, 1994, 30(23): 503-507.

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Abstract  The quality TiN film was deposited onto GCr15 steel substrate by the pulsed high energy density plasma technique at room temperature. The adhesive strentgh of TiN coating to GCr15 steel substrate has been satisfactorily measured using automatic scratch tester. The critical load with remarkable higher values may be available to characterize theadhesive strength of the coating. The critical load of the TiN coating was revealed to be varied with numbers of pulsed plasma, the discharge voltage between inner and outer electrodes and pressure of working gases. These have been discussed and explained on the theoretical bases. (Correspondent: YAN Fengxun, associate professor, Institute of physics, Chinese Academy of Sciences, Beijing 100080)
Key words:  pulsed plasma      TiN coating      adhesive strength     
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