LASER SYNTHESIS AND CHARACTERIZATION OF NANO-CRYSTALLINE Si POWDER
LI Yali; LIANG Yong; XIAO Keshen; ZHENG Feng; HU Zhuangqi(State Key Lab of RSA ; Institute of Metal Research; Chinese A cademy of Sciences; Shenyang 110015)(Manuscript received 94-02-28)
Cite this article:
LI Yali; LIANG Yong; XIAO Keshen; ZHENG Feng; HU Zhuangqi(State Key Lab of RSA ; Institute of Metal Research; Chinese A cademy of Sciences; Shenyang 110015)(Manuscript received 94-02-28). LASER SYNTHESIS AND CHARACTERIZATION OF NANO-CRYSTALLINE Si POWDER. Acta Metall Sin, 1995, 31(13): 21-25.
Abstract Nano-crystalline Si powder with mean particle diameter of 20 -100 nm and grain diameter of 18-37 nm has been synthesized by laser-induced high purity silane gas reaction. The influences of processing parameters on the formation of the powders was studied and the powders produced were characterized by various techniques (TEM. XPS. XRD.FTIR and BET). Results show that the powder consists of monodispersed spherical particles and agglomerated irregular particles. The Si powder with monodispersed equiaxed particles with small size are favoured to form under lowering laser power and raising Ar dilute. There is 2.0- 3.0 wt-% of oxygen impurities in the Si powder mainly existing on particle surface in O-Si-H bond state. which came from the chemisorption of the powder to oxygen in air. Correspondent. LI Yali, Institute of Metal Research. Chinese Academy of Sciences Sheayang 110015)
