物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
收稿日期: 2020-10-29
修回日期: 2021-01-25
网络出版日期: 2021-02-05
基金资助
国家重点研发计划项目(2016YFB0700201);国家自然科学基金项目(51871198)
Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
Received date: 2020-10-29
Revised date: 2021-01-25
Online published: 2021-02-05
Supported by
National Key Research and Development Program of China(2016YFB0700201);National Natural Science Foundation of China(51871198)
曹庆平 , 吕林波 , 王晓东 , 蒋建中 . 物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应[J]. 金属学报, 2021 , 57(4) : 473 -490 . DOI: 10.11900/0412.1961.2020.00430
Metallic glass thin film (MGTF) is a new thin film material developed based on metallic glasses. It has excellent physical, chemical, and mechanical properties owing to its disordered atomic packing structure. Moreover, nanostructured MGTF can be synthesized by adjusting the process of physical vapor deposition to construct nanostructure interfaces and overcome the intrinsic brittleness of bulky metallic glasses. Recently, the rapid development of MGTF in various fields has attracted extensive attention and has become a new research hotspot. In this paper, by reviewing the influence of preparation parameters on the microstructure and properties of MGTF, and sample size effect. In this manner, research progress is analyzed and summarized, and research prospects are briefly proposed to provide reference for researchers engaged in the study of MGTF.
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