Ti-B-N纳米复合涂层的设计、制备及性能
收稿日期: 2020-03-19
修回日期: 2020-05-22
网络出版日期: 2020-07-28
基金资助
国家自然科学基金项目(51301181);国家自然科学基金项目(51875555);天津市科技重大专项项目(18ZXJMTG00050);天津市自然科学基金项目(19JCYBJC17100)
Design, Preparation and Properties of Ti-B-N Nanocomposite Coatings
Received date: 2020-03-19
Revised date: 2020-05-22
Online published: 2020-07-28
Supported by
National Natural Science Foundation of China(51301181);National Natural Science Foundation of China(51875555);Tianjin Science and Technology Major Project(18ZXJMTG00050);Tianjin Natural Science Foundation(19JCYBJC17100)
利用脉冲直流磁控溅射技术研制Ti-B-N涂层,通过降低反应气体N2流量,减少涂层中a-BN (a代表非晶)软质相的含量,增大TiB2靶溅射功率,提高硬质相TiB2的含量,形成nc-(Ti2N, TiB2)/a-BN (nc代表纳米晶)纳米复合结构,实现涂层增韧和强化。系统研究了TiB2靶溅射功率对Ti-B-N涂层成分、微观结构和性能的影响,利用EDS、HRTEM、SEM、XRD、纳米压痕仪和划痕测试仪对涂层进行表征和测试,利用球-盘式摩擦磨损试验机测试涂层摩擦学性能。结果表明,随着TiB2靶溅射功率增加,Ti-B-N涂层结构逐渐由nc-Ti2N/a-BN演变成hcp-TiB2/a-BN;Ti-B-N涂层的纳米硬度也逐渐增加,当TiB2靶溅射功率为2.4 kW时,涂层硬度最高,约为33.8 GPa;此时Ti-B-N涂层的摩擦系数和磨损率也最低,分别为0.55和2.1×10-4 μm3/(N·μm),涂层耐磨性能最佳。
刘艳梅 , 王铁钢 , 郭玉垚 , 柯培玲 , 蒙德强 , 张纪福 . Ti-B-N纳米复合涂层的设计、制备及性能[J]. 金属学报, 2020 , 56(11) : 1521 -1529 . DOI: 10.11900/0412.1961.2020.00087
TiB2 coating comprises a large number of ionic and covalent bonds, conferring it with excellent properties such as high melting point, high hardness, and good oxidation and corrosion resistances. However, its application to cutting tool surfaces is limited due to high brittleness. When doped with N atoms, TiB2 coating forms a nanocomposite structure with improved toughness. However, the hardness of the resulting coating is significantly impaired by the abundant amorphous BN (a-BN) phase. The addition of metal ions and reactive N2 increases the proportion of hard nitrides and improves the coating hardness. However, the addition of N2 increases the amount of soft a-BN phase, which largely negates the strengthening effect. To further improve the mechanical properties of Ti-B-N coating, a series of Ti-B-N coatings were prepared by pulsed direct current magnetron sputtering in this work. The content of soft-phase a-BN in the coating was reduced by decreasing the flow of reactive gas N2. Meanwhile, the amount of hard TiB2 phase was increased by increasing the sputtering power of the TiB2 target. Consequently, a noncrystalline (nc)-(Ti2N, TiB2)/a-BN nanocomposite coating with significantly improved toughness and strength was formed. The influence of TiB2 target sputtering power on the composition, microstructure, and mechanical and tribological properties of the Ti-B-N coatings were systematically investigated by EDS, TEM, SEM, XRD, and nano-indentation, scratch, and ball-on-disk tribological testings. As the sputtering power of the TiB2 target increased, the microstructure of Ti-B-N coatings gradually evolved from nc-Ti2N/a-BN to hexagonal-close-packed TiB2/a-BN, and the nanohardness also increased gradually. The particle size on the coating surface was significantly increased, and all Ti-B-N coatings were uniform and compact without pinholes and other defects. The coating with highest hardness of about 33.8 GPa was achieved under a sputtering power of 2.4 kW at the TiB2 target. This coating also exhibited the lowest friction coefficient (0.55), lowest wear rate (2.1×10-4 μm3/(N·μm)), and best wear resistance.
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