Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应*
收稿日期: 2016-07-19
网络出版日期: 2016-08-25
基金资助
* 国家重点基础研究发展计划项目 2010CB631003, 国家自然科学基金项目51571157, 51321003, 51322104和51201123, 高等学校学科创新引智计划项目B06025及陕西省自然科学基金基础研究计划项目2015JM5158资助
SIZE EFFECTS ON THE DEFORMATION AND DAMAGEOF Cu-BASED METALLIC NANOLAYEREDMICRO-PILLARS
Received date: 2016-07-19
Online published: 2016-08-25
Supported by
Supported by National Basic Research Program of China (No.2010CB631003), National Natural Science Foundation of China (Nos.51571157, 51321003, 51322104 and 51201123), Program of Introducing Talents of Discipline to Universities of China (No.B06025) and Natural Science Basic Research Plan in Shaanxi Province of China (No.2015JM5158)
孙军 , 张金钰 , 吴凯 , 刘刚 . Cu系纳米金属多层膜微柱体的形变与损伤及其尺寸效应*[J]. 金属学报, 2016 , 52(10) : 1249 -1258 . DOI: 10.11900/0412.1961.2016.00315
The nanostructured metallic multilayers (NMMs) are widely used as essential components of high performance microelectronics and interconnect structures. The deformation and damage of NMMs is the essential factor leading to the structural failure of these systems. In this paper, based on these experimental results achieved by the authors, as well as the state-of-the-art and progress at home and abroad in the plastic deformation behavior of micropillars of Cu-based NMMs, the correlation of microstructure-size constraint-mechanical performance in the Cu-based nanolayered micropillars is illustrated. The universality of their deformation modes and internal damage mechanisms are revealed, and the work hardening /softening behaviors of two types of nanolaminates, including crystalline/crystalline and crystalline/amorphous NMMs, are summarized. Finally, a brief prospect on the studies of NMMs in future is suggested.
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