采用非平衡磁控溅射离子镀技术在M2工具钢和单晶Si表面沉积多元CrMoAlN纳米多层薄膜. 利用EDS, SEM, XRD, XPS, 纳米压痕仪和销盘磨损试验仪研究Mo含量对CrMoAlN薄膜成分、表面和截面形貌、相结构、化学价态、显微硬度和摩擦性能的影响. 结果表明, 不同Mo含量的CrMoAlN薄膜均为fcc结构, Mo代替了CrAlN晶格中部分Cr或Al的位置, 形成了以fcc-CrN相为基础的CrMoAlN置换固溶体. 随着Mo含量提高, CrMoAlN薄膜表面颗粒尺寸明显减小, 截面柱状晶结构逐渐消失. CrMoAlN薄膜的显微硬度和弹性模量随着Mo含量的增加而提高, 摩擦系数和磨损率随着Mo含量的提高而降低. Mo含量为19.47% (原子分数)时, 显微硬度与弹性模量均达到最大值29.70 GPa和427.53 GPa, 摩擦系数和磨损率达到最小值0.271和1.2×10^-16 m³/(Nm).

In recent decades, CrAlN coatings have been widely used for cutting tools due to their high hardness, good wear resistance, especially excellent thermal stability and oxidation resistance. However, the rapid development in high speeds and dry cutting applications demands further improvement in hardness and wear properties of CrAlN coatings. Mo nitrides coatings are commonly used as protective surface layers against wear and corrosion. The combination of CrAlN and Mo may lead to the development of new composite coatings with superior wear properties. In this study, the CrMoAlN multilayer coatings with different Mo contents were deposited on M2 tool steel and silicon wafers substrates by closed-field unbalanced magnetron sputtering ion plating (CFUMSIP) technique in a gas mixture of Ar+N₂. The chemical composition, surface and cross sectional morphologies, microstructure, mechanical and tribological properties of coatings were studied by EDS, SEM, XRD, XPS, nano-indentation and pin-on-disk tribometer, respectively. The results indicate that the CrMoAlN coatings exhibit fcc structure. Mo atoms substitute Cr and/or Al atoms in CrAlN lattice forming the solid solution CrMoAlN coatings. The surface and cross-sectional morphologies of the CrMoAlN coatings show that the grain size and the column width decrease with the increasing of Mo content. Nano-indentation result reveals a promoted hardness and elastic modulus of the CrMoAlN coatings with enhanced Mo content from 0 to 19.47% (atomic fraction) due to the solid solution strengthening and grain size diminishment. A maximum hardness and elastic modulus of the coatings are found to be 29.70 GPa and 427.53 GPa when the Mo content reached to 19.47%. The average friction coefficient and wear rate were observed to decrease with the increase of Mo content and the lowest values were 0.271 and 1.2×10^-16 m³/(Nm), respectively, at 19.47%Mo.