激光诱导转移技术制备超精细导电图案研究进展

袁康, 曹文鑫, 孙春强, 王卓超, 王笑笑, 张宇民, 朱嘉琦

Research Progress on the Preparation of Ultrafine Conductive Patterns Using Laser-Induced Transfer Technology

YUAN Kang, CAO Wenxin, SUN Chunqiang, WANG Zhuochao, WANG Xiaoxiao, ZHANG Yumin, ZHU Jiaqi

图8 复合工艺路线[86~88]

Fig.8 Continuous wave laser realizing the transfer and synchronous sintering of metal nano-Ag[86] (a); cross-sectional SEM image of the Cr grain layer deposited on a glass substrate by LIFT and electroless plating methods[87] (b); and schematic of nanoparticle structure fabrication by a combination of the nanosphere lithography and LIT[88] (c)