激光诱导转移技术制备超精细导电图案研究进展

袁康, 曹文鑫, 孙春强, 王卓超, 王笑笑, 张宇民, 朱嘉琦

Research Progress on the Preparation of Ultrafine Conductive Patterns Using Laser-Induced Transfer Technology

YUAN Kang, CAO Wenxin, SUN Chunqiang, WANG Zhuochao, WANG Xiaoxiao, ZHANG Yumin, ZHU Jiaqi

图7 采用LIT多次脉冲转移法制备的3D金属柱[84,85]

Fig.7 Low (a) and high (b) magnified SEM images of LIFT printed copper metal pillar array (7 × 10 pillars) with a width of 9 µm and a height of 106 µm[84]; SEM images and schematics of fluid LIFT and an Ag pillar (c) and solid LlFT and a Cu pillar (d)[85]