激光诱导转移技术制备超精细导电图案研究进展
Research Progress on the Preparation of Ultrafine Conductive Patterns Using Laser-Induced Transfer Technology
(a) ΔZ = 0 (b) ΔZ = 10 μm (c) ΔZ = 30 μm (d) ΔZ = 40 μm
激光诱导转移技术制备超精细导电图案研究进展 |
| 袁康, 曹文鑫, 孙春强, 王卓超, 王笑笑, 张宇民, 朱嘉琦 |
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Research Progress on the Preparation of Ultrafine Conductive Patterns Using Laser-Induced Transfer Technology |
| YUAN Kang, CAO Wenxin, SUN Chunqiang, WANG Zhuochao, WANG Xiaoxiao, ZHANG Yumin, ZHU Jiaqi |
| 图6 不同供体-受体间距的80 nm厚铜膜沉积点的形貌特征[ (a) ΔZ = 0 (b) ΔZ = 10 μm (c) ΔZ = 30 μm (d) ΔZ = 40 μm |
| Fig.6 Morphological characteristics of deposition spots in 80 nm-thick copper films with different donor-receptor spacings (ΔZ)[ |
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