激光诱导转移技术制备超精细导电图案研究进展

袁康, 曹文鑫, 孙春强, 王卓超, 王笑笑, 张宇民, 朱嘉琦

Research Progress on the Preparation of Ultrafine Conductive Patterns Using Laser-Induced Transfer Technology

YUAN Kang, CAO Wenxin, SUN Chunqiang, WANG Zhuochao, WANG Xiaoxiao, ZHANG Yumin, ZHU Jiaqi

图5 不同激光能量下气泡形成和银浆转移的动态过程[73] (a) below critical threshold (b) critical transfer threshold (c) above critical threshold (d) much higher than critical threshold

Fig.5 Dynamic processes of bubble formation and silver paste transfer under different laser energies[73] (dg—transfer gap, r1—radius of the laser-induced bubble, r2—radius of the silver paste front profile. (I) represents formation of the small bubble under initial laser irradiation; (II) represents hemispherical expansion or unstable fragmentation of the bubble in the direction normal to the surface during evolution, and non-contact or contact shown between the acceptor and the bubble; (III) represents the bubble no longer expanded after laser irradiation was terminated and detachment of the acceptor away from the donor substrate; (IV) represents solidification of the formed line after the separation of donor and acceptor)