耐腐蚀磨损CrN/NbN涂层的沉积机制及缺陷控制

刘永康, 陆媛媛, 杨英, 刘兴光, 郑军, 张世宏

Deposition Mechanism and Defect Control of CrN/NbN Coatings with Excellent Tribocorrosion Performance

LIU Yongkang, LU Yuanyuan, YANG Ying, LIU Xingguang, ZHENG Jun, ZHANG Shihong

图8 S2~S5涂层表面形貌的背散射电子(BSE)像及缺陷面积分布

Fig.8 Backscattered electrons (BSE) images of surface morphologies of coatings prepared by different processes (Insets are the defect area distributions) (a) S2 (b) S3 (c) S4 (d) S5