<strong>Mo</strong>含量对<strong>CrAlMoN</strong>涂层微观结构、力学性能及摩擦学性能的影响

Mo含量对CrAlMoN涂层微观结构、力学性能及摩擦学性能的影响

毕健浩男, 张艳, 王振玉, 周晟昊, 刘永跃, 张小岩, 汪爱英

Effect of Mo Content on the Microstructure, Mechanical and Tribological Properties of CrAlMoN Coatings

BI Jianhaonan, ZHANG Yan, WANG Zhenyu, ZHOU Shenghao, LIU Yongyue, ZHANG Xiaoyan, WANG Aiying

表1 CrAlMoN涂层的详细沉积参数

Table 1 Deposition parameters in detail of the CrAlMoN coatings

Sample	DC pulsed bias / V	N₂ flow rate mL·min^-1	Target current / A				Deposition time min
Sample	DC pulsed bias / V	N₂ flow rate mL·min^-1	Cr	CrAl	Cr	CrMo	Deposition time min
Ar⁺ etching	-200	0	0	0	0	0	25
Cr adhesive layer	-300	0	70	0	70	0	10
CrN transition layer	-70	550	70	0	70	0	20
CrAlMoN layer	-70	650	0	80	0	100	120