(AlCrTaTiZr)N x 阻氚涂层制备及其表面氢同位素吸附
张建东, 席晓翀, 凌永生, 曾繁荣, 单卿, 贾文宝

Preparation of (AlZrTaTiZr)N x Tritium Barrier Coating and Adsorption of Hydrogen Isotope on the Surface
ZHANG Jiandong, XI Xiaochong, LING Yongsheng, ZENG Fanrong, SHAN Qing, JIA Wenbao
图6 不同N2流量(RN = 0~20%)下氮化物薄膜表面以及截面形貌SEM像
Fig.6 Surfacial (a-e) and cross-sectional (f) SEM images of nitride films under different N2 flow rates
(a) RN = 0 (b) RN = 5% (c) RN = 10% (d, f) RN = 15% (e) RN = 20%