(AlCrTaTiZr)N x 阻氚涂层制备及其表面氢同位素吸附
Preparation of (AlZrTaTiZr)N x Tritium Barrier Coating and Adsorption of Hydrogen Isotope on the Surface
(AlCrTaTiZr)N x 阻氚涂层制备及其表面氢同位素吸附 |
| 张建东, 席晓翀, 凌永生, 曾繁荣, 单卿, 贾文宝 |
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Preparation of (AlZrTaTiZr)N x Tritium Barrier Coating and Adsorption of Hydrogen Isotope on the Surface |
| ZHANG Jiandong, XI Xiaochong, LING Yongsheng, ZENG Fanrong, SHAN Qing, JIA Wenbao |
| 图5 不同N2体积流量比(RN)下氮化物薄膜的XRD谱 |
| Fig.5 XRD spectra of nitride films at different volume flow rate of N2 (RN—volume flow ratio of N2 / (Ar + N2)) |
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