Y掺杂Ti膜的吸放氢行为
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李聪, 王猛, 屠汉俊, 施立群
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Behavior of Hydrogen Absorption and Desorption in Y-doped Ti Films
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LI Cong, WANG Meng, TU Hanjun, SHI Liqun
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表4 离子束分析测量吸氘前后的元素含量以及薄膜厚度
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Table 4 Element concentration and film thickness before and after deuterium absorption measured by ion beam analysis
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| Sample | Before/after hydrogenation | Thickness / (1015 atoms·cm-2) | Atomic fraction of Ti / % | Atomic fraction of Y / % | Atomic fraction of D / % |
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| Ni | Ti |
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Ti (TiD0.63) | Before | 57 | 7060 | 100 | 0 | 0 | | After | 50 | 11300 | 61.50 | 0 | 38.50 | TiY0.08 (TiY0.08D0.73) | Before | 48 | 7200 | 92.50 | 7.50 | 0 | | After | 45 | 12200 | 55.11 | 4.59 | 40.30 | TiY0.13 (TiY0.13D0.78) | Before | 50 | 6370 | 88.80 | 11.20 | 0 | | After | 45 | 10800 | 52.44 | 6.56 | 41.00 |
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