Y掺杂Ti膜的吸放氢行为

李聪, 王猛, 屠汉俊, 施立群

Behavior of Hydrogen Absorption and Desorption in Y-doped Ti Films

LI Cong, WANG Meng, TU Hanjun, SHI Liqun

图1 磁控溅射复合靶示意图

Fig.1 Schematic of magnetron sputtering composite target