柔性、可拉伸变形微型热电器件的设计与集成

刘瑞, 于治, 赵洋, 李晓齐, 喻海龙, 何娟, 聂鹏程, 王春雨, 邰凯平, 刘畅

Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices

LIU Rui, YU Zhi, ZHAO Yang, LI Xiaoqi, YU Hailong, HE Juan, NIE Pengcheng, WANG Chunyu, TAI Kaiping, LIU Chang

图3 可拉伸变形的拱形聚二甲基硅氧烷(PDMS)基底的制作

Fig.3 Schematics of the fabrication of stretchable and deformable arch PDMS substrate (a1-a6) cross-sectional flow charts of arch PDMS substrate fabrication (a1) stretch PDMS (a2) attach sacrificial layer metal foil(a3) pouring, scraping, and curing PDMS (a4) attach support sheet metal(a5) pouring, scraping, and curing PDMS again (a6) erosion of sacrificial metal flakes (b1, b2) patterned metal zinc flakes for sacrificial metal layer (b1) and supporting metal layer (b2) (c) stretchable deformable arch PDMS substrate