柔性、可拉伸变形微型热电器件的设计与集成

刘瑞, 于治, 赵洋, 李晓齐, 喻海龙, 何娟, 聂鹏程, 王春雨, 邰凯平, 刘畅

Design and Integration of Flexible and Stretchable Micro-Thermoelectric Devices

LIU Rui, YU Zhi, ZHAO Yang, LI Xiaoqi, YU Hailong, HE Juan, NIE Pengcheng, WANG Chunyu, TAI Kaiping, LIU Chang

图2 微型柔性热电器件制作流程图

Fig.2 Flow chart of the fabrication of micro-flexible thermoelectric devices (a) preparation of PDMS flexible substrate (b) transfer thermoelectric films (c) deposition of gold electrodes (d) three-dimensional thermal electric generator (TEG) device