基于飞秒激光时域热反射法的微尺度Cu-Sn金属间化合物热导率研究

周丽君, 位松, 郭敬东, 孙方远, 王新伟, 唐大伟

Investigations on the Thermal Conductivity of Micro-Scale Cu-Sn Intermetallic Compounds Using Femtosecond Laser Time-Domain Thermoreflectance System

ZHOU Lijun, WEI Song, GUO Jingdong, SUN Fangyuan, WANG Xinwei, TANG Dawei

表2 Cu3Sn热导率拟合计算结果及误差统计 (W·m-1·K-1)

Table 2 Statistics of calculated results of thermal conductivity and corresponding error of Cu3Sn

Item Raw data 4.1% (cp ) -1.2% (cp ) 1 nm (dAl) -1 nm (dAl) 1 μm (Dpump) -1 μm (Dpump) Error ±1.4% -4.0% 1.3% 1.5% -1.5% 0.2% -0.2% 1 89.3 85.7 90.4 90.7 88.0 89.5 89.1 2 87.1 83.6 88.2 88.4 85.8 87.3 86.9 3 86.5 83.0 87.5 87.8 85.2 86.7 86.3 Mean 87.6 84.1 88.7 89.0 86.3 87.8 87.4