高速钢表面TiN薄膜的界面疲劳剥落行为

邱龙时, 赵婧, 潘晓龙, 田丰

Interfacial Fatigue Spalling Behavior of TiN Films on High Speed Steel

QIU Longshi, ZHAO Jing, PAN Xiaolong, TIAN Feng

表1 TiN薄膜制备参数及力学性能

Table 1 Preparation parameters and mechanical properties of TiN films

Film t / μm Interfacial state Lc / N Pc / N Hv / GPa TiN 1.6 GD-20 min + Ti*-10 min > 100 > 1000 24.5 ± 0.5 TiN 3.7 GD-5 min + Ti*-0 min 30 400 24.0 ± 0.7 TiN 3.7 GD-10 min + Ti*-5 min 90 1000 23.8 ± 0.8 TiN 3.7 GD-20 min + Ti*-10 min > 100 > 1000 24.7 ± 0.4