物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应

曹庆平, 吕林波, 王晓东, 蒋建中

Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property

CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong

图15 Pd82Si18金属玻璃薄膜(厚度为250 nm，基底为聚酰亚胺)在经历10%应变过程中，裂纹形成的3个阶段[70] (a) early-stage deformation where a single shear event within a single shear band leads to the formation of a single step on the surface as explained in the schematic diagram (b) (c) an intermediate stage with a neck formed due to the activation of another shear band, as represented in (d) (e) a fully developed and open crack, the corresponding schematic diagram with the profile of crack edges is depicted in (f)

Fig.15 Three different stages of crack/shear band evolution in 250 nm thick polymer-supported Pd82Si18 films after straining to 10% can be clearly distinguished[70]