物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应 |
| 曹庆平, 吕林波, 王晓东, 蒋建中 |
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Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property |
| CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong |
| 图11 直径为3.61 μm、1.84 μm、440 nm和140 nm的Pd-Si金属玻璃薄膜微柱压缩变形SEM像[ |
| Fig.11 SEM images of Pd-Si metallic glass thin film micro-pillars with diameters of 3.61 μm (a), 1.84 μm (b), 440 nm (c), and 140 nm (d) after compression deformation[ |
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