物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
曹庆平, 吕林波, 王晓东, 蒋建中

Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong
图8 在基底温度为473 K、倾角为30°的条件下制备出来的Ni60Nb40金属玻璃薄膜表面和断面SEM像,以及表面粗糙度、密度、颗粒尺寸和柱状结构尺寸随基底温度的变化[38]
Fig.8 Top-surface (hierarchical microstructure area and microcracks were depicted by the dotted blue and red lines, respectively) (a) and cross-sectional (b) SEM images of the Ni60Nb40 metallic glass film under the conditions of 473 K substrate temperature and 30° tilt angle (Inset in Fig.8b shows the statistics histogram of the column size distribution), the surface root-mean-square (RMS) roughness changes (c), and density, particle size, columnar structure size vary with the substrate temperature (d)[38]