物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应 |
| 曹庆平, 吕林波, 王晓东, 蒋建中 |
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Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property |
| CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong |
| 图8 在基底温度为473 K、倾角为30°的条件下制备出来的Ni60Nb40金属玻璃薄膜表面和断面SEM像，以及表面粗糙度、密度、颗粒尺寸和柱状结构尺寸随基底温度的变化[ |
| Fig.8 Top-surface (hierarchical microstructure area and microcracks were depicted by the dotted blue and red lines, respectively) (a) and cross-sectional (b) SEM images of the Ni60Nb40 metallic glass film under the conditions of 473 K substrate temperature and 30° tilt angle (Inset in Fig.8b shows the statistics histogram of the column size distribution), the surface root-mean-square (RMS) roughness changes (c), and density, particle size, columnar structure size vary with the substrate temperature (d)[ |
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