物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应 |
| 曹庆平, 吕林波, 王晓东, 蒋建中 |
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Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property |
| CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong |
| 图7 Au-Cu-Pd-Ag-Si金属玻璃薄膜粗糙度、平均颗粒尺寸随气压的变化曲线[ |
| Fig.7 The change curves of roughness (Ra) (a) and average particle size (b) of Au-Cu-Pd-Ag-Si metallic glass film with working pressure, respectively[ |
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