物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
曹庆平, 吕林波, 王晓东, 蒋建中

Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong
图2 基底温度为293、363、423和493 K下制备的1 μm厚度Ni-Nb金属玻璃薄膜的表面SEM像,及基底温度为293和493 K下沉积的厚度为50 nm的Ni-Nb金属玻璃薄膜的STEM像[23]
Fig.2 SEM images on the surface of 1 μm-thick Ni-Nb metallic glass films prepared at the substrate temperature of 293 K (a), 363 K (b), 423 K (c), and 493 K (d); STEM images of 50 nm-thick Ni-Nb films deposited at the substrate temperatures of 293 K (e) and 493 K (f)[23]