物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应
Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property
物理气相沉积制备金属玻璃薄膜及其力学性能的样品尺寸效应 |
| 曹庆平, 吕林波, 王晓东, 蒋建中 |
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Magnetron Sputtering Metal Glass Film Preparation and the “Specimen Size Effect” of the Mechanical Property |
| CAO Qingping, LV Linbo, WANG Xiaodong, JIANG Jianzhong |
| 图2 基底温度为293、363、423和493 K下制备的1 μm厚度Ni-Nb金属玻璃薄膜的表面SEM像，及基底温度为293和493 K下沉积的厚度为50 nm的Ni-Nb金属玻璃薄膜的STEM像[ |
| Fig.2 SEM images on the surface of 1 μm-thick Ni-Nb metallic glass films prepared at the substrate temperature of 293 K (a), 363 K (b), 423 K (c), and 493 K (d); STEM images of 50 nm-thick Ni-Nb films deposited at the substrate temperatures of 293 K (e) and 493 K (f)[ |
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