Al中间层和Ni(V)过渡层对Co/Al/Cu三明治结构靶材背板组件焊接残余应力的影响
姜霖, 张亮, 刘志权

Effects of Al Interlayer and Ni(V) Transition Layer on the Welding Residual Stress of Co/Al/Cu Sandwich Target Assembly
JIANG Lin, ZHANG Liang, LIU Zhiquan
表2 靶材背板组件材料的物理性能
Table 2 Physical properties of target assembly
Material

Thermal conductivity

W·m-1·K-1

Elastic modulus

GPa

Density

kg·m-3

c

J·kg-1·K-1

α

10-6 K-1

ν
Co target89.5211.0885047313.90.32
Cu backplane369.0128.0888939016.50.34
Al interlayer238.070.6270090023.80.33
Ni(V) layer76.5199.0891057414.90.33