外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1

图13. 沿LaAlO3衬底[001]方向外延生长的PbTiO3薄膜组成的外延结构(010)倒易空间平面示意图

Fig.13. Schematic representation of the (010) reciprocal space map of PbTiO3/LaAlO3 epitaxial structure, where the substrate is LaAlO3 with surface normal of [001] and the epitaxial film is PbTiO3 (qx and qz are along [100]* and [001]* directions, respectively. ap, PTO and av, PTO are the lattice parameters of PbTiO3 along [100] and [001] directions, respectively. ap, LAO and av, LAO are the lattice parameters of LaAlO3 along [100] and [001], respectively. shows the (003) and (103) diffraction points from substrate of LaAlO3, shows the (003) and (103) diffraction points from epitaxial layer of PbTiO3, "pseu" means that the epitaxial layer is pseudomorphic, "rel" means that the epitaxial layer is fully relaxed. The upper right color map inset shows the (103) diffraction points from the PbTiO3/ LaAlO3 epitaxial structure. The arrows "α" describes the move path of the diffraction point of the layer during relaxation. The angle of α satisfies the relation of 2c12c11tanα=tan(ω-θ), c11 and c12 are the elastic stiffness constants)