外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1

图8. 沿ΔG的强度分布

Fig.8. Intensity (IG) distribution along ΔG (The half-peak width is 0.88/t, the numbers under the figure are the diffraction order n, ΔG is the relative change quantity of vector G, t is the thickness of film)