外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(
),王元明1(),王甦程1
),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1
),WANG Yuanming1(),WANG Sucheng1
图6. 影响衍射斑点宽化的因素
Fig.6. Schematics for broadening of diffraction points from epitaxial films
