外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(
),王元明1(),王甦程1
),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1
),WANG Yuanming1(),WANG Sucheng1
图5. 立方结构外延膜和衬底的(h0l)倒易面
Fig.5. Reciprocal space illustration of the (h0l) reflections of cubic substrate and epitaxial films(a) substrate and unrelaxed film (b) substrate and fully relaxed film(c) satellites of superlattice in film (d) substrate and tilted film
