外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1

图4. 扫描方式与衍射几何示意图

Fig.4. Illustration of scan types and scattering geometries (ωi—angle between incident X-ray and sample surface, ωe—angle between diffracted X-ray and sample surface)(a) scan types including ω, 2θ-ω and 2θ(b) scattering geometry for symmetric (002) reflection of single crystal SrTiO3(c) scattering geometry for asymmetric (103)+ reflection of single crystal SrTiO3(d) scattering geometry for asymmetric (103)- reflection of single crystal SrTiO3