外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1

图3. 样品与探测器的旋转轴

Fig.3. Schematic illustration (a) and physical map (b) for the rotation axes of sample and detector (ω—the rotation angle around ZL axis by right-hand spiral rule; ψ—the azimuthal angle; ?—the rotation angle around the normal direction of sample surface; XL, YL, ZL—laboratory coordinate axes; X, Y, Z—sample translation coordinate axes)