外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(
),王元明1(),王甦程1
),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1
),WANG Yuanming1(),WANG Sucheng1
图2. X射线粉末衍射和高分辨衍射的光路系统示意图
Fig.2. Schematics of optics for powder X-ray (a) and high-resolution X-ray (b) diffractometers
