外延膜的高分辨X射线衍射分析
李长记1,邹敏杰1,2,张磊1(),王元明1(),王甦程1
High-Resolution X-Ray Diffraction Analysis of Epitaxial Films
LI Changji1,ZOU Minjie1,2,ZHANG Lei1(),WANG Yuanming1(),WANG Sucheng1

图1. SrTiO3单晶的倒易空间与衍射条件示意图

Fig.1. Schematics of reciprocal space and diffraction condition for the SrTiO3 single crystal (2θ—diffraction angle, ki—incident vector of X-ray, kd—diffracted vector of X-ray, S—scattering vector)(a) reciprocal lattice points of reflections with [0v0] zone axis for the SrTiO3 single crystal(b) Ewald construction of the symmetric SrTiO3 (002) reflection(c) Ewald constructure of the asymmetric SrTiO3 (103) reflection(d) range in reciprocal space which can be probed by S