电弧复合磁控溅射结合热退火制备Ti2AlC涂层

李文涛,王振玉,张栋,潘建国,柯培玲,汪爱英

Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing

Wentao LI,Zhenyu WANG,Dong ZHANG,Jianguo PAN,Peiling KE,Aiying WANG

表2 No.1~No.5样品中涂层在沉积态和退火态时的Ti/Al比

Table 2 Ti/Al ratios of No.1~No.5 coatings in as-deposited and annealed samples

Sample No.1 No.2 No.3 No.4 No.5 As-deposited 2.38 2.04 1.64 0.66 0.42 As-annealed 3.06 1.75 1.09 0.99 0.54