电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛,王振玉,张栋,潘建国,柯培玲,汪爱英

Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI,Zhenyu WANG,Dong ZHANG,Jianguo PAN,Peiling KE,Aiying WANG
表1 Ti-Al-C涂层沉积参数
Table 1 Deposition parameters of Ti-Al-C coatings

Procedure

Ar flow

mL·min-1

CH4 flow

mL·min-1

Presure

Pa

Bias voltage

V

Current / A
Ion gunArcSputter
Etching40---3000.2--
TiC layer200503.99-100-70-
Ti-Al-C layer200153.99-200-608.0