电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图13. No.1样品(0002)和(10ˉ13)晶面处晶粒尺寸随退火温度的变化
Fig.13. Changes of grain size at (0002) and (10ˉ13) plane with different annealing temperatures for No.1 sample
