电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图10. No.1样品沉积态及经不同温度退火1 h后的截面形貌及线扫描图
Fig.10. Cross-section SEM images and EDS line-scanning results of No.1 sample as-deposited (a) and annealed at 600 ℃ (b), 650 ℃ (c), 700 ℃ (d), 750 ℃ (e), 800 ℃ (f), 850 ℃ (g) and 900 ℃ (h) for 1 h
