电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图8. No.1样品中涂层在沉积态及800 ℃退火1 h后的HRTEM分析
Fig.8. HRTEM images of as-deposited (a~c) and annealed (d, e) No.1 coatings, and fast Fourier transform image of area A in Fig.8e (f) (Illustration in Fig.8a shows selected-area electron diffraction pattern of as-deposited coating, and inset in Fig.8b shows line scan pattern of the coating surface under TEM, corresponding to the line)
