电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2

图7. No.1样品退火前后的Raman光谱

Fig.7. Raman spectra of the as-deposited No.1 sample and the annealed one (E1g, E2g and A1g stand for three Raman active modes in MAX phase, respectively)