电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图5. No.2和No.4样品经800 ℃退火1 h后截面的线扫描图及面分布图
Fig.5. EDS line-scanning and element mapping results of No.2 (a) and No.4 (b) samples annealed at 800 ℃ for 1 h
