电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图2. No.1~No.5沉积态涂层表面形貌的SEM像
Fig.2. Surface SEM images of No.1 (a), No.2 (b), No.3 (c), No.4 (d) and No.5 (e) coatings in as-deposited samples
