电弧复合磁控溅射结合热退火制备Ti2AlC涂层
李文涛1,2,王振玉2,张栋2,潘建国1,柯培玲2(
),汪爱英2
),汪爱英2
Preparation of Ti2AlC Coating by the Combination of a Hybrid Cathode Arc/Magnetron Sputtering with Post-Annealing
Wentao LI1,2,Zhenyu WANG2,Dong ZHANG2,Jianguo PAN1,Peiling KE2(),Aiying WANG2
),Aiying WANG2
图1. 电弧复合磁控溅射示意图
Fig.1. Schematic of the hybrid cathodic arc/magnetron sputter (No.1~No.5 samples were suspended from top to bottom on a rotating sample holder in the chamber)
