N掺杂对磁控溅射Ta涂层微观结构与耐磨损性能的影响
杨莎莎1,2,杨峰3,陈明辉4(
),牛云松1,朱圣龙1,王福会4
),牛云松1,朱圣龙1,王福会4
Effect of Nitrogen Doping on Microstructure and Wear Resistance of Tantalum Coatings Deposited by Direct Current Magnetron Sputtering
Shasha YANG1,2,Feng YANG3,Minghui CHEN4(),Yunsong NIU1,Shenglong ZHU1,Fuhui WANG4
),Yunsong NIU1,Shenglong ZHU1,Fuhui WANG4
图2. 15Ar和15Ar-5N2沉积态涂层的TEM像及选区电子衍射花样
Fig.2. TEM images of as-deposited 15Ar (a) and 15Ar-5N2 (b) coatings in planar view (Insets show the corresponding SAED patterns of the circle regions)
